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International Journals

Review Articles


• Prem Pal, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Ashok Kumar Pandey, Hiroshi Tanaka & Kazuo Sato "High speed silicon wet anisotropic etching for applications in bulk micromachining: a review",Micro and Nano Systems Letters,9(1), 1-59, 2021 DOI
• Sajal Sagar Singh,Prem Pal,Ashok Pandey,Yan Xing and Kazuo Sato,"Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS: A Review",Micro and Nano Systems Letters, 4(5), 2016 DOI
• Prem Pal and Kazuo Sato,"A Comprehensive Review on Convex and Concave Corners in Silicon Bulk Micromachining based on Anisotropic Wet Chemical Etching",Micro and Nano Systems Letters, vol.3,no.1,pp.,May 2015 DOI
• Prem Pal, Kazuo Sato and Sudhir Chandra,"Fabrication Techniques of Convex Corners in (100)-Silicon Wafer Using Bulk Micromachining:A Review",Journal of Micromechanics and Microengineering, vol. 17, no. 10, pp. R111-R133, October 2007 DOI.
• Prem Pal, Yong-Jun Kim, and Sudhir Chandra, "Front-to-Back Alignment Techniques in Microelectronics/MEMS Fabrication:A Review",Sensor Letters, vol. 4, no. 1, pp.1-10, March 2006 DOI.


Research Papers


• S Purohit, V Swarnalatha, AK Pandey, RK Sharma, P Pal. "Wet Bulk Micromachining Characteristics of Si {110} in NaOH-based solution."Journal of Micromechanics and Microengineering32(12), 124001, 2022 DOI
• MLV Mahesh,P Pal, VV Bhanu Prasad, AR James. "Fatigue and leakage current characteristics of lead free bilayer thin film structures." Ceramics International 48, no. 7, 9006-9013, 2022 DOI
• MLV Mahesh, P Pal, VV Bhanu Prasad, AR James, " Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0. 50Sr0. 50) TiO3 and Ba (Zr0. 15Ti0. 85) O3 Bilayer Thin Film Stacks", Journal of Electronic Materials 51, no. 2, 727-735, 2022 DOI
• A Biswas, VS Pawar, PK Menon, P Pal, AK Pandey, "Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope," Microsystem Technologies 27 (7), 2679-2693, 2021 DOI
• V Swarnalatha, S Purohit, P Pal, and RK Sharma, "Enhanced etching characteristics of Si {100} in NaOH-based two-component solution," Micro Nano system Letters 10(1), 1-8, 2021 DOI
• A Gupta, P Pal, CS Sharma, "Pyramid textured Si {100} surface with low reflectivity in CMOS compatible solution," Micro & Nano Letters 15 (15), 1084-1088, 2020 DOI
• MLV Mahesh, P Pal, VVB Prasad, AR James, "Improved properties & fatigue resistant behaviour OF Ba (Zr0. 15Ti0. 85) O3 ferroelectric ceramics," Current Applied Physics 20 (12), 1373-1378, 2020 DOI
• P Manoj Kumar, A Ashok, P Pal, AK Pandey, "Frequency tuning of weakly and strongly coupled micromechanical beams," ISSS Journal of Micro and Smart Systems 9 (2), 117-130, 2020 DOI
• P Krishna Menon, A Ashok, AVN Rao, AK Pandey, P Pal, "Effect of concentration change of 0.1% Triton added 25 wt% TMAH during Fabrication of deep cavities with mesa structures in SOI wafer," Microelectronic Engineering 227, 111323, 2020 DOI
• Ashok Akarapu, Rohit Prakash Nighot, Lalsingh Devsoth, Mukul Yadav, Prem Pal, and Ashok Kumar Pandey, "Experimental and theoretical analysis of drag forces in micromechanical beam arrays," Phys. Rev. Applied , 13(3), 034003, March 2020
• P. Krishna Menon , A. V. Narasimha Rao, A. Linga Murthy, A K Pandey, and P. Pal "Study of high speed etching of silicon in KOH + NH 2 OH Solution at lower temperatures for the fabrication of through holes in silicon wafer," Micro & Nano Letters , pp. 1-6, 2020
• V Swarnalatha, K T Vismaya, A V Narasimha Rao, P Pal, A K Pandey, H Tanaka, and K Sato, "Etching Mechanism Behind the High-Speed Etching of Silicon in NH2OH-added Alkaline Solutions," IEEJ Transactions on Sensors and Micromachines , 140(1), 24-30, 2020
• V. Swarnalatha, P. Pal, A. K. Pandey, A. V. Narasimha Rao, Y. Xing, H. Tanaka, and K. Sato, "Systematic study of the etching characteristics of Si{111} in modified TMAH," Micro & Nano Letters, Volume 15, Issue 1, January 2020, p. 52 - 57
• V. S. Pawar, P. K. Menon, A. L. Murty, P. Pal, and A. K. Pandey, "Influence of Scalloping on Electrostatic Forces in Comb Drive Microdevices," ISSS Journal of Micro and Smart Systems , 8, 127–134, 2019
• A. V. Narasimha Rao, P. Pal, A. K. Pandey, V. Swarnalatha, P. K. Menon, H. Tanaka, and K. Sato, "Aging effect of NH2OH-added KOH on the etching characteristics of main crystallographic planes," ECS Journal of Solid State Science and Technology , 8(11): P685-P692, 2019
• Akarapu Ashok, Rohit Prakash Nighot, Nagesh Kumar Sahu, Prem Pal, and Ashok Kumar Pandey, "Design and analysis of microcantilever beams based on arrow shape," Microsystem Technologies, 25(11), 4379-4390, 2019
• Gupta, A., Pal, P. and Sharma, C.S., . Surface Texturing of Silicon {100} in an Extremely Low Concentration TMAH for Minimized Reflectivity. ECS Journal of Solid State Science and Technology, 8(10), pp.P622-P628.2019.DOI: 10.1149/2.0301910jss
• A. Ashok, G. Aparna, Prem Pal, A. K. Pandey “An Analysis of Stepped Trapezoidal Shaped Microcantilever beams for MEMS based Devices,”, Journal of Micromechanics and Microengineering , vol. 28, no.6, pp. 085003 (8pp), June 2018 DOI
• V. Swarnalatha, A. V. Narasimha Rao, and Prem Pal “Effective improvement in the etching characteristics of Si{110} in Low concentration TMAH solution,” Micro & Nano Letters, , pp. 6, 2018 DOI
• A. Ashok, P. M. Kumar, S. S. Singh, P Raju, Prem Pal, A. K. Pandey,“Achieving Wideband Micromechanical System using Coupled Non-Uniform Beams Array,” Sensors and Actuators A, , vol. 273, pp. 12-18, April 2018.DOI
• A. V. Narasimha Rao,V. Swarnalatha, A. Ashok, S. S. Singh and Prem Pal"Effect of NH2OH on etching characteristics of Si{100} in KOH solution,", ECS Journal of Solid State Science and Technology , vol.6, no.9, P609-P614, Aug 2017 DOI
• V. Swarnalatha, A. V. Narasimha Rao, A. Ashok, S. S. Singh and Prem Pal " Modified TMAH based etchant for improved etching characteristics on Si{100} wafer.", Journal of Micromechanics and Microengineering , vol.27, no.8, PP.085003(8pp),June 2017 DOI
• Sajal Sagar Singh, Narasimha Rao, Swarnalatha Veerla, Ashok Kumar Pandey and Prem Pal "A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer.," Microsystems Technologies, >, vol.23, no.6, PP.2131-2137, June 2017 DOI
• A. V. Narasimha Rao,V. Swarnalatha and Prem Pal " Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS,", Micro and Nano Systems Letters , vol.5, no.23, PP. 1-9, May 2017 DOI
• A. Ashok and Prem Pal " Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm,", Microsystem Technologies , vol.23, no.1, PP.47-54,Jan 2017 DOI
• Sajal Sagar Singh, Prem Pal and Ashok Kumar Pandey, "Mass sensitivity of non-uniform microcantilever beam," ASME Journal of Vibration and Acoustics,vol.138, no. 6, pp. 064502(7pages), Aug 2016, DOI
• M. A. Gosalvez, Y. Li , N. Ferrando,Prem Pal, K. Sato, Y. Xing " Fluctuations during anisotropic etching: Local recalibration and application to Si{110},", IEEE Journal of Microelectromechanical Systems , vol.25, no.4, PP.25012(5pp), Feb 2016 DOI
• Sajal Sagar Singh, Swarnalatha Veerla, Vivek Sharma, Ashok Pandey and Prem Pal "Precise identication of <100> directions on Si{001} wafer using a novel self-aligning pre-etched technique,", Journal of Micromechanics and Microengineering, vol.26, no.2, pp. 025012, 2016 DOI
• Sajal Sagar Singh, Prem Pal and Ashok Pandey "Pull-in analysis of non-uniform microcantilever beams under large deflection," Journal of Applied Physics 118(20), 204303, 2015 DOI
• K. C. Das, S. P. Ghosh, N. Tripathy, G. Bose, A. Ashok, Prem Pal, D. H. Kim, T. I. Lee, J. M. Myoung, and J. P. Kar " Surface and interface studies of RF sputtered HfO2 thin films with working pressure and gas flow ratio, ", J Mater Sci: Mater Electron, Vol. 26, 6025-6031, 2015 DOI
• V. Sudharshan, Prem Pal and S. Asthana "Influence of A-site cation disorder on structural and magnetocaloric properties of Nd0.7-xLaxSr0.3MnO3 (x=0.0, 0.1, 0.2 & 0.3)", Journal of Rare Earths, 33 (10). pp. 1072-1080, 2015.
• H. Zhang, Y. Xing, M. A. Gosalvez, Prem Pal, and K. Sato "Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives", Sensors and Actuators A, vol. 233, pp. 451-459, Sept. 2015.
• Y. Li, M.A. Gosalvez, Prem Pal, K. Sato and Y. Xing "Particle Swarm Optimization-based Continuous Cellular Automaton for the simulation of Deep Reactive Ion Etching", Journal of Micromechanics and Microengineering, vol. 25, no. 5, pp. 055023 (pp), May 2015 DOI
• Prem Pal, A. Ashok, S. Haldar, Y. Xing, and K. Sato "Anisotropic etching in low concentration KOH: Effects of surfactant concentration", Micro & Nano Letters, vol. 10, no. 4, pp. 224-228, April 2015 DOI
• Akarapu Ashok and Prem Pal, "Synthesis of anodic oxide thin films on Si{100} wafers and their characterization in TMAH for MEMS", ECS Journal of Solid State Science and Technology, vol. 4, no.2, pp. Q1-Q7, 2015 DOI.
• Akarapu Ashok and Prem Pal, "Investigation of anodic silicon dioxide thin films for MEMS applications", Micro & Nano Letters, vol. 9, no. 12, pp. 830-834, Dec. 2014 DOI.
• Prem Pal, M. A. Gosalvez, K. Sato, H. Hida and X. Yan "Anisotropic etching on Si{110}: Experiment and simulation for the formation of microstructures with convex corners", Journal of Micromechanics and Microengineering 24.12, 2014 125001 DOI.
• Prem Pal,Subhomoy Haldar, Sajal Sagar Singh, Ashok Akarapu, XingYan and Kazuo Sato "A detailed investigation and explanation to the appearance of different undercut profiles in KOH and TMAH", Journal of Micromechanics and Microengineering,vol.24 , no. 9 , pp.095026 (9pp), 2014 DOI.
• Bin Tang, Ming Qiu Yao, Gang Tan,Prem Pal,Kazuo Sato, Wei Su "Smoothness control of wet etched Si{100} surfaces in TMAH+Triton", Key Engineering Materials 609, 536-541, 2014.DOI
• V. Sudharshan, T. Durga Rao,Prem Pal and S. Asthana "Study of structural effect on Eu-substituted LSMO manganite for high temperature coefficient of resistance", Physica B: Condensed Matter, vol. 448, no. 1, pp. 277-280, Sept. 2014 DOI.
• Ashok Akarapu and Prem Pal "Growth and etch rate study of low temperature anodic silicon dioxide thin films", The Scientific World Journal, Vol 2014, pp.106029(9pp), Feb 2014 DOI
• Prem Pal and Sajal Sagar Singh "A new model for the etching characteristics of corners formed by Si{111} planes on Si{110} wafer surface", Engineering, vol.5, no.11A, pp. 1-8, Oct. 2013.DOI
• Prem Pal and Sajal Sagar Singh "A simple and robust model to explain convex corner undercutting in wet bulk micromachining", Micro and Nano Systems Letters, vol. 1, no. 1, pp. 1-6, Aug. 2013.DOI:10.1186/2213-9621-1-1
  
  Highly Accessed Article


• Sudarshan Vadnala, Saket Asthana, Prem Pal and S. Srinath,"Influence of Nd substitution by La in Nd0.7Sr0.3MnO3 on structural and transport properties for sensing applications" ISRN Materials Science, pp. 1-10, 2013,DOI
• Prem Pal, K. Sato, and M. A. Gosalvez, "Etched Profile Control in Anisotropic Etching of Silicon by TMAH+Triton," Journal of Micromechanics and Microengineering, vol. 22, no. 6, pp. 065013 (9pp), June 2012.DOI
• M. A. Gosalvez, Prem Pal, N. Ferrando, H. Hida, and K. Sato, "Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples", Journal of Micromechanics and Microengineering, vol. 21, no. 12, pp. 125007 (14pp), Dec. 2011 DOI.
• M. A. Gosalvez, Prem Pal, N. Ferrando, and K. Sato, "Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples", Journal of Micromechanics and Microengineering, vol. 21, no. 12, pp. 125008 (12pp), Dec 2011 DOI
• M. A. Gosalvez, Prem Pal, and K. Sato, Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {100}, {110} and {111} surfaces", Journal of Micromechanics and Microengineering, vol. 21 , no. 10, pp. 105018 (17pp), Oct. 2011.
• M. A. Gosalvez, N. Ferrando, Y. Xing, Prem Pal, K. Sato, J Cerda-Boluda and R.Gadea Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton", Journal of Micromechanics and Microengineering, vol. 21, no. 6, pp. 065017 (16pp), June 2011.
• Prem Pal, K. Sato, M. A. Gosalvez, B. Tang, H. Hida, and M. Shikida, "Fabrication of novel microstructures based on orientation dependent adsorption of surfactant molecules in TMAH solution," Journal of Micromechanics and Microengineering, vol. 21, no. 1, pp. 015008 (11pp), Jan. 2011.
• Prem Pal and K Sato, "Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes," Microsystem Technologies, vol. 16, no. 7, pp. 1165-1174, July 2010.
• B. Tang, M. Shikida, K. Sato, Prem Pal, H. Amakawa, H. Hida and K. Fukuzawa, "Study of surfactant-added TMAH for the applications in DRIE + wet etching based micromachining," Journal of Micromechanics and Microengineering, vol. 20, no. 6, pp. 065008 (9pp), May 2010.
• Prem Pal, M. A. Gosalvez and K. Sato, "Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: etching mechanism and advanced application," Japanese Journal of Applied Physics, vol. 49, pp. 056702 (9 pages), May 2010
• M. A. Gosalvez, Prem Pal, Bin Tang, K. Sato, "Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions," Sensors and Actuators A, vol. 157, no. 1, pp. 91-95, Jan. 2010
• Bin Tang, Prem Pal, M. A. Gosalvez, M. Shikida, K. Sato, H. Amakawa, and S. Itoh, "Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH", Sensors and Actuators A, vol. 156, no. 2, pp. 334-341, 2009
• M. A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura and K. Ishibashi, "Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications", Journal of Micromechanics and Microengineering, vol. 19, no. 12, pp. 125011 (18pp), Dec. 2009
• Prem Pal, K. Sato, M. A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang, and S. Itoh, "Surfactant adsorption on single crystal silicon surfaces in TMAH solution: orientation-dependent adsorption detected by in-situ infra-red spectroscopy," IEEE Journal of Microelectromechanical Systems, vol. 18, no. 6, pp. 1345-1356, Dec. 2009
• Prem Pal and Kazuo Sato, "Complex three dimensional structures in Si{100} using wet bulk micromachining", Journal of Micromechanics and Microengineering, vol. 19, no. 10, pp. 105008 (9pp) October 2009
• Prem Pal, Kazuo Sato, Mitsuhiro Shikida and Miguel A. Gosalvez, "Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH", Sensors and Actuators A, vol. 154, no. 2, pp. 192-203, Sept. 2009
• Prem Pal and Kazuo Sato, "Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography", Journal of Micromechanics and Microengineering, vol. 19, no.5, pp. (055003)1-11, May 2009
• Prem Pal and Kazuo Sato, "Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices", Sensor Letters, vol. 7, no. 1, pp. 11-16, February 2009
• Prem Pal, Kazuo Sato, Miguel A. Gosalvez and Mitsuhiro Shikida, "Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants", Journal of Micromechanics and Microengineering, vol. 17, no.11, pp. 2299-2307, November 2007
• Sudhir Chandra, Vivekanand Bhatt, Ravindra Singh, Preeti Sharma and Prem Pal, "MEMS prototyping using RF sputtered films", Indian Journal of Pure and Applied Physics, vol. 45, no. 4, pp. 326-331, April 2007
• Ravibabu Mulaveesala, Prem Pal, and Suneet Tuli, Interface study of bonded wafers by digitized linear frequency modulated thermal wave imaging", Sensors and Actuators A, vol. 128, no. 1, pp. 209-216, March 2006
• H. Bahadur, S. B. Samanta, A. K. Srivastava, K. N. Sood, R. Kishore, R. K. Sharma, A. Basu, Rashmi, M. Kar, Prem Pal, V. Bhatt, S. Chandra, "Nano and micro structural studies of thin films of ZnO", Journal of Material Science, vol. 41, no. 22, pp. 7562-7570, November 2006
• Prem Pal and Sudhir Chandra, "RF Sputtered Silicon for MEMS", Journal of Micromechanics and Microengineering, vol. 15, no.8, pp. 1536-1546, August 2005
• Vivekanand Bhatt, Prem Pal, and Sudhir Chandra "Feasibility study of RF sputtered ZnO film for surface micromachining," Surface and Coatings Technology, vol. 198, pp. 304-308, August 2005
• Prem Pal and Sudhir Chandra, "Recessed microstructures with perfect convex corners for accelerometers", Sensor Letters, vol. 2, no. 3-4, pp. 226-231, September 2004.
• Prem Pal and Sudhir Chandra, "Bulk-micromachined structures inside anisotropically etched cavity", Smart Material and Structures, vol. 13, no. 6, pp. 1424-1429, December 2004.
• Prem Pal and Sudhir Chandra, "A novel process of perfect convex corner realization in bulk micromachining", Journal of Micromechanics and Microengineering, vol. 14, no.10, pp. 1416-1420, October 2004.
• Prem Pal, Suneet Tuli, and Sudhir Chandra, "A new technique of front-to-back alignment for MEMS", Sensor Letters, vol. 2, no.1, pp.78-81, March 2004.
• Prem Pal, Suneet Tuli, and Sudhir Chandra, "Design and fabrication of SiO2 micromechanical structures inside anisotropically etched cavity", International Journal of Computational Engineering Science, vol.4, no.3, pp.489-492, September 2003.
• Prem Pal and K. Sato: Extension of 3D shapes of MEMS structures realized by wet etching (Study of micromachining of single crystal silicon", Journal of the Japan Society of Mechanical Engineers C, vol.76, No.768, pp. 1899-1901, 2010.


Invited Talks


• National Workshop on National Workshop on RF and Bio-MEMS, KL University, Vaddeswaram, AP, 30-31st March, 2017, (Title: Design and Fabrication of RF- and Bio-MEMS Components Using Micromachining Technology)
• Short Term Training Programme on “Nano, Micro and Bulk Material Processing and Nanotechnology” (STTP), Gokaraju Rangaraju Institute of Engineering and Technology (GREIT) Hyderabad, Telangana, 20-26 March 2017, (Title: Fabrication of Silicon Based MEMS/NEMS)
• One-week workshop on "MEMS Design and its Applications" from Oct. 24-28, 2016, Sree Vidyanikethan Engineering College Tirupati
• Seminar on Renewable Source of Energy (RSE-2016), Manipal University Jaipur, India, June 8, 2016 (Title: MEMS based components for low power energy harvesting)
• International conference on Energy, Functional Materials And Nanotechnology (ICEFN-2016), Kumaun University Nainital, Uttarakhand, India, March 27-29, 2016 (Title: Silicon Dioxide Deposited at Room Temperature for MEMS and Silicon Surface Texturing)
• Gautam Buddha University Noida, (Title: Silicon Microelectromechanical System (MEMS): Role of Science and Engineering, Date: 17th Aug 2015)
• National Workshop on Recent Trends in MEMS for Biomedical and Weather Monitoring Applications (RTMBWMA-2014), LBR College of Engineering, Mylavram, AP, 18-19th Oct, 2014, (Title: Micromechanical Structures for BioMEMS)
• National Workshop on Research Opportunities in Micro/Nano systems, KL University, Vaddeswaram, AP, 25-26th March, 2013, (Title: Silicon Micromachining in MEMS)
• 4th Nagoya Univ.-Okmetic MEMS seminar 'MEMS for Personal Life' March. 1-2, 2012, Nagoya, Japan (Title: Secretes of TMAH-based Silicon Micromachining)
• International Conference On Microactuators and Micromechanisms (MAMM 2012), January 19-20, 2012, CMERI, Durgapur, India (Title: DRIE vs Wet Anisotropic Etching in MEMS)
• Georgia Institute of Technology (Title: Recent Advancement in CMOS Process Compatible Wet Anisotropic Etching, Date: 4th Dec 2009)
• Nagoya University Nagoya, Japan (Title: New Shapes of MEMS Components by CMOS Compatible TMAH Wet Anisotropic Etching, Date: 26th Dec 2008)
• Jiangsu IntelliSense Technology Co., Ltd., Nanjing, China ((Title: MEMS Fabrication Processes and Complex Wet-Etched Bulk Micromachined Components, Date: 12th Feb 2009)
• Nagoya University Japan (Title: Fabrication of Perfect Convex Corners in (100)-Si Wafer Using Wet Bulk Micromachining Process, Date: 31st July 2006)


International Conferences


• S Purohit, P Pal, AK Pandey Comparative study of perforated microcantilevers for MEMS applications, Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS, 2021
• A Gupta, P Pal, CS SharmaA Facile Way of Surface Texturing of Si {100} using KOH for Silicon Solar Cells, Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS, 2021.
• AVN Rao, P Pal, AK Pandey, PK Menon, H Tanaka, K Sato "High speed silicon wet bulk micromachining of Si {111} in KOH based solution"Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS,2020
• A Biswas, VS Pawar, PK Menon, P Pal, AK Pandey Scalloping Effect on the Performance of a MEMS Device 237th ECS Meeting with the 18th International Meeting on Chemical Sensors. 2020
• A Gupta, P Pal, CS Sharma Effect of Etching Temperature on the Surface Texturing of Si {100} in an Extremely Low Concentration Tmah for Minimized Reflectivity ECS Meeting Abstracts, 1323, 2020
• A. V. Narasimha Rao, V. Swarnalatha and Prem Pal , " Effect of Surfactant and Alcohol Additives on Etching Characteristics in Aqueous Potassium Hydroxide Solutions ", 231st ECS Meeting in New Orleans, LA , May 28-June 1, 2017
• V. Swarnalatha, A.V. Narasimha Rao, and Prem Pal , " Silicon Anisotropic Etching in Ternary Solution Composed of TMAH + Triton + NH2OH,", 231st ECS Meeting in New Orleans, LA, May , 28-June 1, 2017
• Sajal Sagar Singh, Prem Pal, Ashok Kumar Pandey "Highly sensitive Microelectromechanical mass sensors using non-uniform beams", 13th International Conference on Nanomechanical Sensing (13th NMC), Delft, The Netherlands , 22-24 June 2016.
• S.S Singh, Prem Pal, A.K. Pandey, "Frequency and Pull-in Analysis of Non-Uniform MEMS Cantilever Beams", 18th International Workshop on Physics of Semiconductor Devices (IWPSD-2015), IISc, Bangalore, India, Dec. 7-10, 2015
• A. Ashok and Prem Pal, "Optimization and Investigation of Room Temperature Synthesized Silicon Dioxide Thin Films for MEMS and Silicon Surface Texturing", 18th International Workshop on Physics of Semiconductor Devices (IWPSD-2015) , IISc, Bangalore, India, Dec. 7-10, 2015
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• Ashok Akarapu and Prem Pal, "Room temperature synthesis of SiO2 thin films for mems and silicon surface texturing", 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS-18), Estoril, Portugal, pp. , Jan 18-22, 2015.
• Kazuo Sato and Prem Pal, "Anisotropy control in wet etching of silicon by selective adsorption of surfactant molecules", ICSS-2014, Hong Kong
• Ashok Akarapu and Prem Pal, "Study of anodically grown silicon dioxide thin film in TMAH", 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Daegu Korea, June 29-July 2, 2014.
• Sudarshan Vadnala, Saket Asthana, and Prem Pal, "Tunable magnetocaloric effect, temperature coefficient of resistance and magnetoresistance near room temperature for different sensors applications", 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Daegu Korea, June 29-July 2, 2014.
• Sajal Sagar Singh, Yuan Li, Yan Xing and Prem Pal, "Simulation of thin film deposition profile on complex 2-D MEMS structures", 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Daegu Korea, June 29-July 2, 2014.
• A. Ashok, S. Premee, V. Sudharshan, and Prem Pal, "Surface Texturing of Si{100} using TMAH with Different Concentrations for Solar Cells", 2nd International Conference on Advance Trends in Engineering and Technology" (ICATET-2014), Jaipur Rajasthan, India, April 18-19, 2014.
• V. Sudharshan, R. Singh, S. Asthana, and Prem Pal, "Experimental investigation on high TCR manganites at room temperature for uncooled microbolometer applications", 2nd International Conference on Advance Trends in Engineering and Technology" (ICATET-2014), Jaipur Rajasthan, India, April 18-19, 2014.
• S. Haldar, A. Ashok, and Prem Pal, "An experimental investigation of the appearance of different planes at convex corner in TMAH and KOH solutions", 2nd International Conference on Advance Trends in Engineering and Technology" (ICATET-2014), Jaipur Rajasthan, India, April 18-19, 2014.
• Ashok Akarapu and Prem Pal, "Optical Characterization of Anodically Grown Silicon Dioxide Thin Films", XVII International Workshop on Physics of Semiconductor Devices (IWPSD-2013), Amity University, Noida, India, Dec. 10-13, 2013.
• Sajal Sagar Singh, Yuan Li, Yan Xing and Prem Pal, "The Application of Level Set Method for Simulation of PECVD/LPCVD Processes", XVII International Workshop on Physics of Semiconductor Devices (IWPSD-2013), Amity University, Noida, India, Dec. 10-13, 2013.
• Sudarshan Vadnala, Saket Asthana, and Prem Pal, "Study of structural effect on Eu-substituted LSMO manganite for high temperature coefficient of resistance", International conference on magnetic materials and applications (MAGMA-2013), IIT Guhawati, India, Dec. 05-07,2013.
• Sudarshan Vadnala, Saket Asthana, and Prem Pal, "Enhanced TCR with room temperature TMI for potential application in microbolometer", XVII International Workshop on Physics of Semiconductor Devices (IWPSD-2013), Amity University, Noida, India, Dec. 10-13, 2013.
• Y. Li, Y. Xing, M.A. Gosalvez, Prem Pal, and Y. Zhou, "Particle Swarm Optimization of Model Parameters: Simulation of Deep Reactive Ion Etching by the Continuous Cellular Automaton", Transducer-2013, June16-20, 2013, Barcelona. Spain
• Prem Pal,M. A. Gosalvez, and K. Sato, "Dependence of Undercutting on Stirring and Galvanic Interactions Between Emerging Facets During Silicon Etching In TMAH+Surfactant", 6th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Nanjing China, July 8-11, 2012.
• Prem Pal,Kazuo Sato and H. Hida, "MEMS Components with Perfectly Protected Edges and Corners in Si{110} Wafers," Proc. IEEE Intl. Symp. on MHS & Micro-Nano G-COE (Nov. 6-9, 2011, Nagoya, Japan), pp. 55-99.
• Prem Pal,K. Sato, M. A. Gosalvez, B. Tang, and H. Hida, "Advanced MEMS Applications using Orientation Dependent Adsorption of Surfactant Molecules in TMAH Solution", 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Perth Western Australia, July 6-9, 2010.
• B. Tang, H. Amakawa, M. Shikida, H. Hida, N. Inagaki, Prem Pal and K. Sato, "Characterization of Etching Anisotropy in a Surfactant-Added TMAH Solution, and its Application to Scalloping Reduction", 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), Perth Western Australia, July 6-9, 2010.
• Prem Pal and Kazuo Sato, "Fabrication Methods Based on Wet Bulk Micromachining for the Realization of Advanced MEMS Structures", XV International Workshop on Physics of Semiconductor Devices (IWPSD-2009), New Delhi, India, Dec. 15-19, 2009.
• Prem Pal and Kazuo Sato, "Advanced wet etch bulk micromachining in {100} silicon wafers", 2009 MRS Fall Meeting, 1st Nov. 2009- 4th Dec. 2009, Boston, MA. US.
• Prem Pal and Kazuo Sato, "Wet Etched Complex Three Dimensional MEMS Structures," Proc. IEEE Intl. Symp. on MHS & Micro-Nano G-COE (Nov. 8-11, 2009, Nagoya, Japan), pp. 553-558.
• Bin Tang, Miguel A Gosalvez, Prem Pal, Shintaro Itoh, Hirotaka Hida, Mitsuhiro Shikida, and Kazuo Sato, "Adsorbed Surfactant Thickness on A Si Wafer Dominating Etching Properties of TMAH Solution", Proc. IEEE Intl. Symp. on MHS & Micro-Nano G-COE (Nov. 8-11, 2009, Nagoya, Japan), pp. 48-52.
• Prem Pal, K. Sato, H. Hida, M.A. Gosalvez, Y. Kimura, K. Ishibashi and M. Niwano, "Surfactant in TMAH for New Shapes of Silicon MEMS Components; Its Orientation Dependent Adsorption Detected by Infrared Spectroscopy", Transducer-2009, June 21-25, 2009, Denver, Colorado, USA.
• Prem Pal, and Kazuo Sato "Silicon Microfluidic Channels and Microstructures in Single Photolithography Step", Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP-2009), Rome, Italy, April 1-3, 2009, pp. 415-419.
• Prem Pal, and Kazuo Sato, "Micromachined Sealed Cavities by Silicon Wafer Bonding for the Formation of Microstructures of Desired Thickness Using TMAH Etching", Proc. IEEE Intl. Symp. on MHS & Micro-Nano COE (Nov. 6-9, 2008, Nagoya, Japan) pp. 12-16.
• Prem Pal, Kazuo Sato, and Mitsuhiro Shikida, "Suspended Si Microstructures with Rounded Concave and Sharp Convex Corners Using Wafer Bonding and Wet Anisotropic Etching", 214th ECS Meeting, Semiconductor Wafer Bonding 10: Science, Technology, and Applications, Honolulu, Hawai, USA, pp. 133-140, October 12-17, 2008.
• Prem Pal, Kazuo Sato, Mieguel A. Gosalvez, and Mitsuhiro Shikida, "An Improved Anisotropic Wet Etching Process for the Fabrication of Silicon MEMS Structures by Single Etching Mask", 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS-08), Tucson, Arizona, USA, pp.327-330, Jan 13-17, 2008.
• Prem Pal, Kazuo Sato, Mieguel A. Gosalvez, and Mitsuhiro Shikida, "Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching", MOEMS-MEMS-2008 (Part of SPIE Photonics West), San Jose, USA, pp. 68820F-1-8, Jan 19-24, 2008.
• Prem Pal, Kazuo Sato, Mieguel A. Gosalvez, and Mitsuhiro Shikida, "Novel Wet Anisotropic Etching Process for the Realization of New Shapes of Silicon MEMS Structures", Proc. IEEE Intl. Symp. on MHS & Micro-Nano COE (Nov. 11-14, 2007, Nagoya, Japan), pp. 499-504.
• Prem Pal, Vivekanand Bhatt, and Sudhir Chandra, "RF Sputtered Silicon Nitride for LOCOS Process and MEMS", 2nd International Conference on Technological Advances of Thin Films & Surface Coatings (Thin Film -2004), Singapore, July 13-17, 2004.
• Prem Pal, Sudhir Chandra, and Harish Bahadur, "RF Sputtered Silicon Thin Films for MEMS," 2nd International Conference on Technological Advances of Thin Films & Surface Coatings (Thin Film -2004), Singapore, July 13-17, 2004.
• Sudhir Chandra, Vivekanand Bhatt, Prem Pal, Harish Bahadur, K.N.Sood, Ram Kishore, R.P.Pant and S.K.Haldar, "RF Sputtered Materials for MEMS Based Microwave Circuit Components", Asia Pacific Microwave Conference (APMC-2004), New Delhi, India December 15-18, 2004.
• Harish Bahadur, R.K.Sharma, Vivekanand Bhatt, Prem Pal, and Sudhir Chandra, "Scanning Tunneling Microscope Investigations of Thin Films of ZnO", International Conference on Smart Materials, Chiang Mai, Thailand, December 1-3, 2004.
• Prem Pal and Sudhir Chandra, "Capacitive Pressure Sensor and Accelerometer Design Using Recessed Microstructures", XII International Workshop on Physics of Semiconductor Devices (IWPSD-2003), IIT Madras, India, pp.721-723, December 16-20, 2003.
• Prem Pal, Suneet Tuli, and Sudhir Chandra, "P+ Silicon Recessed Micromechanical Structures for MEMS Applications", Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, Mandelieu-La Napoule, France, pp. 378-381, May 5-7, 2003.
• Prem Pal, Prashant Chauhan, Suneet Tuli, Gorang Bose, and Sudhir Chandra "Amplitude Measurement of Vibrating Silicon Using Talbot Interferometry", XI International Workshop on Physics of Semiconductor Devices (IWPSD-2001), IIT New Delhi, India, pp. 540-543, December 11-15, 2001.
National Conferences
• Prem Pal and Kazuo Sato, "Extension of 3D Shapes of MEMS Structures Realized by Wet Etching", IEEJ SMS Symposiumon Sensors, Micromechanics and Applied Systems, Tokyo, Japan, October 15-16, 2009.
• Prem Pal, K. Sato, M. A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano, H. Hida, B. Tang, and S. Itoh, "Experimental Verification and Theoretical Explanation of the Effect of Surfactant Addition to TMAH Based Etchants for Advanced Applications in MEMS", IEEJ SMS Symposiumon Sensors, Micromechanics and Applied Systems, Tokyo, Japan, October 15-16, 2009.
• Prem Pal and Kazuo Sato, "A Comparative Study of Non-ionic Surfactants in TMAH for Conformal Wet Anisotropic Etching on (100)-Si Wafers", IEEJ SMS Symposium on Sensors, Micromechanines & Applied Systems, October 22-24, 2008, Okinawa, Japan.
• Prem Pal, Sudhir Chandra, K.N.Sood, Ram Kishore, and Harish Bahadur, "Physical Characterization of RF Sputtered Silicon for MEMS Applications", Conference on Electron Microscopy and Allied Fields, New Delhi, India, pp. 174-175, April 1-3, 2004.