Prof. Prem Pal

Dr. Prem Pal

MEMS & Micro/Nano Systems Laboratory
Department of Physics

Indian Institute of Technology Hyderabad
Telangana, India - 502 285
Phone No :+91-40-2301-6035
Fax. No : +91-40-2301-6032
E-mail : prem [at] iith [dot] ac [dot] in

Academic Profile

  • Indian Institute of Technology Delhi, India
    Ph.D in the area of MEMS 2004,
    Thesis title: Some Novel Processes and Techniques for MEMS Design, Fabrication and Characterization
  • M. Tech Solid State Materials 1999
    Dissertation: Fabrication and Characterization of MOS Capacitor for High Performance Silicon Devices and ICs

Research Interests

  • MEMS/Microelectronics technology
  • Silicon Micromachining
  • Anodic Oxidation
  • IR Detector
  • MEMS-based Bio/Chemical Sensors
  • Inertial sensors
  • Thin films for MEMS


  • PH1010: Physics-I
  • PH1031: B.Tech Lab
  • PH5130: Quantum Mechanics-I
  • PH5211: MSc Lab
  • PH 6340: Semiconductor Physics & Devices
  • PH6450: MEMS and Microsystem Technology

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