Indian Institute of Technology Hyderabad
Telangana , India - 502 285
Phone No :+91-738 236 5161
E-mail : me11028 [at] iith [dot] ac [dot] in
Research Interests
Linear and Nonlinear Vibrations
Resonant Sensors
MEMS based Bio/Chemical Sensors and Actuators
Silicon Micromachining
Modeling and Simulations
Publications
Peer-reviewed International Journal
S.S. Singh, P. Pal and A.K. Pandey, "Mass sensitivity of non-uniform microcantilever beam,", ASME J. Vib. Acoust., 2016, [Accepted]
S.S. Singh, P. Pal, A.K. Pandey, Y. Xing and K. Sato, "Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS (Review Article)", Micro and Nano Sys. Lett., 4(5) 2016
S.S. Singh, V.N. Avvaru, S. Veerla, A.K. Pandey and P. Pal "A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer.," Microsys. Technol.,2016, [Accepted]
S.S. Singh, P. Pal, and A.K. Pandey, "Pull-in analysis of non-uniform microcantilever beams under large deflection," J. Appl. Phys. 118(21), 042545 2015
S.S. Singh, S. Veerla, V. Sharma, A.K. Pandey and P. Pal,"Precise identication of <100> directions on Si{001} wafer using a novel self-aligning pre-etched technique," J. Micromech. Microeng. vol.26, no.2, pp. 025012, 2016
P. Pal, S. Haldar, S.S Singh, A. Ashok, Y. Xing and K. Sato "A detailed investigation and explanation of the appearance of different undercut profiles in KOH and TMAH", J. Micromech. Microeng., vol.24, no.9, pp. 095026, 2014.
P. Pal and S.S Singh "A simple and robust model to explain convex corner undercutting in wet bulk micromachining", Micro and Nano Sys. Lett., vol. 1, no. 1, pp. 1-6, 2013.Highly Accessed Article
P. Pal and S.S Singh "A new model for the etching characteristics of corners formed by Si{111} planes on Si{110} wafer surface", Engg., vol.5, no.11A, pp. 1-8, 2013.
S.S Singh, Y. Li, Y. Xing and P. Pal, "The Application of Level Set Method for Simulation of PECVD/LPCVD Processes", Chapter in Physics of Semiconductor Devices, Springer, pp 239-242, Dec. 2014 ISBN 978-3-319-03002-9
International Conference
S.S Singh , P. Pal, A.K. Pandey "Highly sensitive Microelectromechanical mass sensors using non-uniform beams", 13th International Conference on Nanomechanical Sensing (13th NMC), Delft, The Netherlands , 22-24 June 2016 [Received financial grant from Science and Engineering Research Board (SERB), Government of India to attend the conference]
S.S Singh , P. Pal, A.K. Pandey "Frequency and Pull-in Analysis of Non-Uniform MEMS Cantilever Beams", 18th International Workshop on Physics of Semiconductor Devices (18th IWPSD), IISc, Bangalore, India , 07-10 Dec. 2015
S.S Singh, Y. Li, Y. Xing and P. Pal, "Simulation of Thin Film Deposition on complex 2-D structures used in MEMS", VII Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT-2014), Daegu, South Korea, June 28th - July 2nd, 2014.